Specifications for vickers microhardness testers 微小維氏硬度計技術(shù)條件
Microhardness tester indicate that the hardness increases with the increase of n2 flow rate ( ar flow rate is fixed ) and decreases with the increases of ar flow rate ( n2 flow rate is fixed ) 經(jīng)用顯微硬度計測試,我們發(fā)現(xiàn)隨著n2流量的增加(固定ar流量) ,薄膜的硬度增高。隨著ar流量的增加(固定n2流量)薄膜的硬度降低。
( 4 ) the study of the optical band gap of cnx film by uv - vis spectrophotometer . ( 5 ) by using the microhardness tester , we study the hardness of cnx film on the ceremic substrate by dc magnetron reactive sputtering with the feed ar and n2 flow rate , film thickness , substrate temperature and substrate bias ( 5 )用直流磁控反應(yīng)濺射法,以陶瓷作為襯底,對在ar和n2不同流量、不同膜厚、不同基片溫度和對基片施加不同偏壓下沉積的薄膜,用< wp = 4 >顯微硬度計研究測試了不同工藝參數(shù)下的相應(yīng)硬度。